Outline
6ƒand 8ƒ(SW-8400) or 12ƒ(SW-12400) wafer can be placed in the quartz oven.

Feature
•Quartz oven can be heated up to 500°C.
•Generated gas from only one side of the wafer can
  be trapped into PAT.
•The wafer can be inserted or removed with ease by
  the built-in hydraulic pump.
•The chiller unit, facilitates quick cool down, is
  installed as standard accessory.


Specification
♦Wafer size: 6ƒand 8ƒ(SW-8400)
  12ƒ(SW-12400)
♦Special O-ringl: Polyimide ring
♦Oven material: Quartz
♦Oven heating: Sandwich method
♦Heating temp.: Max. 400°C (up to 500° for baking)
♦Cooling method: Cooling water circulation
♦Purge gas: Normally nitrogen
♦Purge gas flow rate: 500 ml/min
♦Over heat protector Power supply:
  15 A, Sens.: 30 mA
♦Dimensions/weight:
  1140 W X 1106 H X 750 D (mm)/280 Kg
♦Power supply:
  AC 200 V (s.p.), 15 A / AC 100 V, 20 A