Outgas Collector for Silicon Wafers
SW series is an outgas collector from Silicon Wafer samples. SW-8400III is designed for 6 inch or 8 inch, and SW-12400III is designed for 12 inch silicon wafer to collect surface outgas in the quartz oven with elevated temperature.
•Able to collect outgas from silicon wafer surface, from 6 inch to 12 inch size at maximum temp. at 500°C.
•Reduced dead volume, applied sample tube trap method, enables trace analysis.
•Able to collect outgas only from surface side, whilst outgas from backside is discharged completely by vacuum pump.
•The wafer can be inserted or removed with ease by the built-in hydraulic pump.
•Touch panel is improved for user friendly operation.
• Chiller unit is the standard accessory for time saving of cool-down.
• Safety System : Safety rock, Emergency stop, Leak detector, Overheat sensor stopper
Cover surface of silicon wafer by quartz plate and collect only surface outgas. Pre-heated purge gas runs along the quartz plate and runs to center and into PAT, adsorbent sample tube. By vacuum pump, it enables to collect outgas only from surface side, whilst outgas from backside is discharged completely.
♦Hat shaped collecting method
♦Wafer size: 6 inch and 8 inch (SW-8400) and 12 inch (SW-12400) Smaller size than 5”, JAI offers a special jig. Bigger size than 12 inch, please ask.
♦Oven material: Quartz glass
♦Oven heating: Surface and Bottom Individual heating method
♦Heating temp.: Max. 400°C (up to 500°C for baking)
♦Cooling: Cooling water circulation
♦Heater pipe: Inside deactivation treated
♦ Purge gas: N or He for general use, Flow rate up to 500 ml/min
♦Safety system : Safety rock, Emergency stop, Leak detector, Overheat sensor stopper